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[ZrO2-TiO2]膜料的蒸发特性

EVAPRATIVE PROPERTIES OF FILM MATERIAL-[ZrO2-TiO2]

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【作者】 庞叔鸣; 唐永红; 王金恒;

【Author】 Pang Shu-ming Tang Yong-hong Nanjing Institute of TechnologyWang Jin-heng Nanjing Electron Tube Factory

【机构】 南京工学院; 南京工学院; 南京电子管厂;

【摘要】 [ZrO2-TiO2]是重要的氧化物膜料之一。[ZrO2-TiO2]薄膜的折射率具有明显的不稳定性,其变化范围为2.07~2.34,并出现负的或正的非均匀性。通过成分分析证明:ZrO2具有助氧作用;薄膜折射率与Zr/Ti比具有线性关系。并给出了Zr原子在熔坑内表面的分布。

【Abstract】 Film material-(Zr02-Ti02)is one of the important oxide materials.It has gradually been in use in our country.The refractive index of thin film,ZrO2-TiO2,possesses obvious unstability, whose changes remain in the order of 2.072.34 and appear to be a non-uniformity,positive and negative.it has been proved that ZrO has an oxygen-supporting action,and that refractive index of thin film is a linear relationship with Zr/Ti content ratio.Distribution of Zr atoms on the inner surface of the melting pit is given.

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