【摘要】 用国产DX-3A型扫描电子显微镜分析红外探测器材料,可成功地检测线度10μm以下的碲镉汞中的富磅夹杂相和碲锡铅中的金属夹杂相.精密测量了Hg_1-xCd_xTe和Pb_1-xSn_xTe的微区组成,可分辨出△x/x>2%的横向组成不均匀性.也可相当精确地测量PbSnTe-PbTe异质外延层的厚度.更多还原

【Abstract】 In this paper some results from examining infrared detector materials using scanning electron microscope of type DX-3A (manufactured in China) are reported. Te-rich inclusions in HgCdTe and metal inclusions in PbSnTe have been detected successfully, the smallest dimension of which is ten micrometers. Precision determination of compositions of Hg1-xCdxTe and Pb1-xSnxTe crystals is made, and inho-mogeneity of δΔx/x>2% in a crystal wafer can be discriminated. The thieknees of hetero-epitaxial layer of PbSnTe-PbTe can also be determined.更多还原