【摘要】 本文研究了用喷涂法制备高透明、高电导率的ITO薄膜,建立了简单、适宜的喷涂实验装置,探讨了不同In/Sn重量比、温度等工艺条件对膜透光率、电阻率的影响,对膜的光电性能和结构进行了测试;波长在500—800nm范围内分别在普通玻璃和硼硅酸盐玻璃片上获得了方块电阻达2—5Ω/口,透光率大于80％的ITO膜和方块电阻达6Ω/口,透光率达90—98％的ITO薄膜。更多还原

【Abstract】 Highly conductive and transparent thin films of indium--tin-oxide(ITO)have been prepared by a simple pyrolitic (spray) method. The conditions ofpreparation were described. Highly transparent (80-98% transmission) ITO filmswere obtained with sheet resistances of approximately 2-5Ω/口 for glasssubstrates and 6Ω/口 for borosilicate glass substrates.更多还原