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电子显微镜中小孔物镜的电子光学性质
THE ELECTRON-OPTICAL PROPERTIES OF PINHOL OBJECTIVE LENSES FOR ELECTRON MICROSCOPE
【摘要】 本文研究了S/D=0.2—1.0(间隔0.1),D1/D2=5,10,20,Vr/(NI)2=0.004—0.024(间隔0.002)的小孔物镜。计算了高斯光学参量和球差系数、色差系数,讨论了小孔物镜的电子光学性质。为电子显微镜设计提供了资料。
【Abstract】 Pinhol objective lenses with S/D=0.2-1.0 (step = 0.1), D1/D2 = 5,10,20 and Vr/(NI)2= 0.004-0.024 (step = 0.002) are studied. The caussian optical parameters, the spherical aberration coefficients and the chromatic aberration coefficients are calculated. The electron-optical properties of pinhol objective lenses are discussed. These results can provide data for the design of electron microscope.
- 【文献出处】 云南大学学报(自然科学版) ,Journal of Yunnan University (Natural Sciences) , 编辑部邮箱 ,1983年03期
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