【摘要】 本文介绍应用离子束刻蚀技术减薄石英晶片,把石英晶体谐振器的基频提高到60～300MH_z。给出了基频及其泛音的动态参数。谐振器具有较小的等效电阻,一般为15～50欧姆(基频),较高的Q值,一般为20000～70000(基频),较好的频谱特性,正常的频率温度特性和良好的机械强度。更多还原

【Abstract】 The application of ion-beam milling to raise the fundamental frequencies of quartz crystal resonators to the range of 60-300 MHz is reported. The parameters of the resonators working in the fundamental and overtone modes are given.The resonators working in the fundamental frequency have low equivalent resistances ranging from 15Ω to 50Ω,high Q values ranging from 20 000 to 70 000,good frequency response, normal frequency-temperature characteristics and satisfactory mechanical behaviors.更多还原