【摘要】 本文在研制成功高精度小型流体参数传感器的基础上，对高精度小型流体参数传 感器的工作原理及其结构进行了简要阐述，并对高精度小型流体参数传感器的非线 性、温度特性、时间漂移进行解析。更多还原

【Abstract】 On the basis of the development of a type of miniature fluid parameter sensors with high accuracy, this paper depicts concisely the operation principle as well as the structure of such sensors. It also gives the analysis of the properties of the sensors, such as nonlinearity, temperature characteristics and long-term drift, etc.更多还原