【摘要】 本文用氦载气熔化-气相色谱建立了红外吸收法测定硅单晶中间隙氧的标定曲线.由于熔化法中实验条件的控制和试样准备的改进,降低了空白,提高了数据的重现性,做出较可靠的标定曲线(其换算常数为6.2ppmA/cm^-1).优于文献中其它的标定曲线.更多还原

【Abstract】 A calibration curve for measuring interstitial oxygen content in single crystal sili-con at room temperature using infrared absorption method has been established by Hecarrier gas fusion-gas chromatography method.Owing to the control of experimentalconditions and improvements on the preparation of specimen,the blank of gas analysishas been lowered and the reproducibility of the results has been improved.We haveobtained a more reliable calibration curve (the calibration constant is 6.2 ppmA/cm^-1)which is better than those published in the literature.更多还原