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球形结构的电子振荡微电离计
Electron Oscillator Mini-Ion Gauge with Spherical Structure
【摘要】 基于Mcilraith型带电粒子振荡器的工作原理,本文提出了一种球形结构的微型电离计的设计方案,并探讨了结构的可行性。作者初步进行了结构设计和性能的模拟试验。其结果,在阳极电压V4=600伏,球电压V3=10伏,灯丝偏压VK=43.5伏下,规管灵敏度K=850托。在已测定的压强P=1×10-5~5×10-5托和Ie=1~12微安范围內,离子流Ii与压强P,以及Ii与Ie特性均是线性的。对x射线光电流和阳极表面脱附离子的影响也作了量测,相应的压强下限约为3×10-11托。由于阳极环尺寸小,电压低,这个值主要为x射线光电流的本底值。由于发射电流很小,便于采用冷阴极发射,从而减少了灯丝的吸放气效应。
【Abstract】 A new gauge proposed in this paper is based on the electrostatic saddle field confinement which is capable of producing long electron paths and hence efficient gas phase ionization. The performance of the experimental gauge(φ20mm)is stated as follows:Va=600V, Vs=10V, Vk=43.5V, it’s sensitivity is 850 torr-1, hence it requires less electron current(1-10μA) and filament power than a standard BA-gauge.The feature of the proposed gauge compared with existing ultrahigh vacuum gauges are mainly very small electrode size and low outgas rate and low gas sorption.In according to our measurements and comparison with Fitch’ s experiments, the low pressure limit is about 3×10-11 torr.
- 【文献出处】 真空科学与技术 , 编辑部邮箱 ,1982年04期
- 【被引频次】1
- 【下载频次】18