【摘要】 本文根据吸气剂吸气的三因素——蒸散吸气因素、表面吸附因素与扩散因素,研究并确定吸气剂吸气的数学模型,用以说明不同情况下的吸气规律:当扩散很快,或气体压力很低时,吸气处于表面吸附决定区;当扩散很慢,或压力很高时,吸气进入扩散决定区。从理论上分析了吸气剂激活与再生的机理;实验研究了锆铝吸气剂泵的多次再生的性能,结果表明,每经一次再生,抽速递减5％,吸气量递减17％。更多还原

【Abstract】 In this paper, based upon the three getttering factors of getters——flash factor, surface adsorption factor and diffusion factor, the mathematical model of getters is established. This model is used to clarify the gettering law in different circumstances: if diffusion velocity is very fast, or gas pressure is rather low, then gettering is in the interval determined by surface adsorption; in contrast, gettering is in the interval determined by diffusion. The mechanism of activation and reactivation for getters are theoretically analysed. The repeated reactivation properties of Zr-Al getter pump are experimentally studied. The fallowing results are pointed out: after each times reactivating, the decreasing of sorption rate is in turn 5%, the decreasing of gettering quantity is in turn 17%.更多还原