【摘要】 本文用扫描电镜电子探针测量了Y切平行于X方向的9微米宽Ti扩散LiNbO₃沟道在Z方向上Ti离子的分布。计算了侧扩散系数,并观察到用稀HF酸（体积比（?）1:200）处理样品（浸泡,擦洗）前后的沟道表面隆起。更多还原

【Abstract】 Scanning electron microscope has been used to observe Ti diffusion parallel to Z direction of the sample surface out of a narrow strip which corresponds to 9 m wide channel waveguide on Y cut LiNbO3 substrate. From these measurements lateral diffusion coefficient was calculated and the swelling of channel at the surface was also observed.更多还原