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一种测量高反膜绝对反射率的新方法

A new method of determining absolute reflectivity of high-reflectivity-films

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【作者】 黄永楷庄大奎

【Author】 HUANG YONGKAIAND ZHUANG DAKUEI (Shanghai Institute of Optics and Fine Mechanics Academia Sinica)

【机构】 中国科学院上海光学精密机械研究所中国科学院上海光学精密机械研究所

【摘要】 提出了一种利用光延迟线的绝对反射率测量法,并给出实验结果。测量精度优于2×10-4.

【Abstract】 This paper presents a new method of measuring high reflectivity-films in respect of their absolute reflectivity by using a spherical cavity optical delay line. This method is characterized by(1) Arbitrary adjustment of the number of reflections of a light beam on a sample mirror and the pattern traced by the light spot and hence a greater suitability to measurements of various kinds.(2) With reflectivity given in terms of its absolute value.(3) Simple in structure, easy for use, suitable for a general application to ordinary laboratories.This paper gives the theoretical calculation formula for designing an optical delay line and a full consideration of this idea used as a reflectivity measuring instrument. The paper also points out that it is possible to measure the transmissivity of low scattering samples with this instrument. Experimental results show that this method can be used to measure the reflectivity of high-reflectivity-films with a precision of better than 2 ? 10-4.

  • 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,1982年01期
  • 【被引频次】13
  • 【下载频次】119
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