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Ⅲ-Ⅴ族半导体材料外延及其物理化学
The Epitaxy of Ⅲ-V Compounds and Its Physical Chemistry
【摘要】 <正>——本文概述了近年来Ⅲ-Ⅴ族半导体材料的外延,特别是有关电外延,金属有机化合物和分子束外延的国内外发展动态及其应用;同时也简要地介绍了Ⅲ-Ⅴ族化合物外延的物理化学.
【Abstract】 In this paper, a review of recent work on epitaxy of Ⅲ-V compounds, particularly the electroepitaxy, metallorganic vapor phase epitaxy and molecular beam epitaxy, is presented together with their main applications.The physical chemistry of the epitaxy of Ⅲ-V compounds is also briefly described,
- 【文献出处】 固体电子学研究与进展 ,Research & Progress of Solid State Electronics , 编辑部邮箱 ,1982年02期
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