【摘要】 本文提出了氦载气熔化-气相色谱法(镍-锡熔池方案)测定硅中微量氧。采用镍-锡熔池时硅中定氧的温度可低于与碳直接接触的空坩埚无浴法。由于改进了实验条件和使用了小型裸体石墨坩埚,降低了气体分析的空白(<0.1μg氧),并提高了分析结果的重现性。分析温度1650～1700℃,抽取时间5分钟,每个坩埚可以分析4个样品。用此法可测定ppm级硅中氧。用本法建立了9μ红外吸收法测定硅单晶中氧标定曲线。更多还原

【Abstract】 With a nickel-tin bath for dissolving metals in a heated graphite crucible, the determination of oxygen can be operated at lower temperatures(1650-1700℃)than in an empty crucible in which the sample is subject to contact with carbon directly. Four samples are permitted to analyze in a crucible with relatively short time of oxygen extraction (5minutes).Owing to the control of experimental conditions, and the application of water cooled quartz tube and a bare graphite crucible in small size, the blank of the gas analysis is lowered (<0.1μg of oxygen), and the reproducibility of the results is improved. By this method oxygen can be determined at ppm levels.更多还原