【摘要】 基于形成准分子的动力学过程,利用联合求解粒子数、光子密度速率方程和电路方程,求得快放电准分子激光器的脉冲宽度、输出功率与有关放电参数之间的关系,并与实验结果作了对比。更多还原

【Abstract】 Based on the kinetic process of excimer formation and using simultaneous solution of the rate equation ior population density and photon density and the equation for discharge circuit, the relationship between the pulse width and output in a fast-discharge excimer laser on the one hand and the discharge parameters on the other hand is obtained.The computed results are essentially in agreement with the experiments.更多还原