【摘要】 在透射电子显微镜（TEM）下观察了五个溅射的NbGe超导薄膜样品.结果表明,在高温（1000℃）时薄膜沉积.其显微结构是大的同轴向的A15晶粒,在晶粒边界上有一些“片状”结构。T_c很高（≥22K）薄膜其显微结构是形状不规则的,带有缺陷的A15晶粒以及有严格花样的“杆状”晶粒.虽然我们不能从电子衍射中辨别（T）Nb₅Ge₃相,但却发现了（六角）Nb₅Ge₃.由此得到,高T_cA15亚稳相是与（T）以及（六角）Nb₅Ge相共存的.更多还原

【Abstract】 Five representative sputtered Nb3Ge superconducting films are chosen for examination under the transmission electron microscope (TEM). The results show that when the film is deposited at high temperature (1000℃), the microstructures consist of large equiaxial A15 grains with some ’ plate-like’ structure at the grain boundaries. The microstructures of the very high Tc(>=22 K) films compose of iyregular shaped A15 grains with defects and ’rod-shaped’ grains with strict pattere. Although we can not identify the (T)Nb5Ge3 phase from electron diffraction but have found (hex) Nb5Ge3 instead, it is suggested that the high Tc metastable A15 phase coexists with (T) and (hex)Nb5Ge3 phases.更多还原