【摘要】 本文介绍了用普通光刻法制作铅铟变厚微桥的一种工艺.给出了几种不同合金比例、不同桥区膜厚的变厚微桥的低温(4.2K)实验研究结果.更多还原

【Abstract】 This paper introduces the technology with which the Pb-In variable thickness micro-bridges were fabricated by the usual photoetching method. Experimental results of several variable thickness microbridges of different Pb-In ratio and different thickness at 4.2K are presented.更多还原