【摘要】 本文主要介绍用高纯氧热氧化制作铅约瑟夫逊隧道结的方法以及一些实验结果.用这种方法可以制作高质量的隧道结,结的成品率较高,临界电流的一致性和重复性较好.本文还介绍了某些检验隧道结氧化层质量的方法.更多还原

【Abstract】 This paper presents principally the fabrication procedures of lead Josephson. tunnel junctions formed by thermal oxidation in high purity oxygen and reports some experimental results. The junctions formed by this method have high quality, high yield rate and good homogeneity and reproducibility of critical currents. The paper also presents some examination methods of the oxide quality of tunnel junctions.更多还原