节点文献

高阻硅中子嬗变掺杂高温退火后的缺陷

High Temperature Annealing Defects of High Resistivity Si Doped by Neutron Transmutation

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 吴书祥晏懋洵华宗璐张玉峰杜永昌

【Author】 Wu Shuxiang, Yan Maoxun, Hua ZhongluZhang Yufeng, Du YongchangDepartment of Physics

【机构】 北京大学物理系北京大学物理系

【摘要】 用DLTS方法研究了在氮气氛下径850℃退火的中子嬗变掺杂硅,发现存在三个深中心,它们在禁带中的位置E_C—E_T为0.20,0.23,和0.49eV。他们可能分别是中照损伤与淬火引进缺陷的复合体、激化杂质及中照损伤与激化杂质的复合体。

【Abstract】 Neutron transmutation doped silicon was studied with DLTS. After annealing in nitrogen at 850℃, three deep levels were found in the gap locating at 0.2eV, 0.23eV, 0.49eV respectively below the conduction band. It is suggested that they are related to the complex consisted of neutron irradiation damage and quenched-in defects, excited impurities, the complex of excited impurities and defects of neutron irradiation, respectively.

  • 【文献出处】 北京大学学报(自然科学版) ,Acta Scicentiarum Naturalum Universitis Pekinesis , 编辑部邮箱 ,1982年06期
  • 【下载频次】39
节点文献中: 

本文链接的文献网络图示:

本文的引文网络