【摘要】 本文提出了一种测定硅中氧和碳含量的新方法,即厚度失配的样品参比法。我们引入了有效晶格吸收系数α_L^*,导出了采用基线法计算α_L^*和杂质吸收系数α_i的统一公式。我们得到1106cm^-1和605cm^-1处的α_L^*的值分别为0.55cm^-1和5.6cm^-1。将本方法测得的氧碳含量同标准的匹配样品参比法结果比较,误差通常小于10％。最后,对本方法的误差来源进行了讨论。更多还原

【Abstract】 A method, called thickness-misfitting sample reference method, for measurement of oxygen and carbon content in silicon is described. Introducing the effective lattice absorption coefficient α_L^*, the universal expression has been derived for calculating α_L^* and impurity absorption coefficient α_i by the base line method. The values of α_L^* obtained at 1106cm^-1 and 605cm^-1 are 0.55cm（-1） and 5.6cm（-1）, respectively. Results obtained by this method have been compared with that by the standard fitting method. The errors are usually less than 10%. The sources of error have also been discussed.更多还原