【摘要】 评述了本法根据剥层化学腐蚀在测定痕量杂质剖面浓度分布中的应用,薄层溅射分析技术及半导体体材料内痕量元素的直接测定和分离技术。更多还原

【Abstract】 The electrothermal atomisation that has been used to obtaining the distribution profiles of trace based on layer-by-layer chemical etching, thin film analytical technique based on sputtering and direct measurement and separation technique of trace in bulk semiconductors are reviewed.更多还原