【摘要】 用四极质谱仪分析锆铝吸气剂泵在激活和再激活期间的气体释放特性,以及吸氢和吸甲烷期的分压强变化。这有助于我们对过程中发生的现象作吸气机理的探讨。更多还原

【Abstract】 Some characteritics of the gas released during activated and reactivated period,ionized type Zirconium-Aluminium getter pump analyzing with a quadrupole mass-spectrometer,are described in the paper.And for the changes partial pressure an analysis of mass-spectrum are made in absorbed H₂ and CH₄.It has been indicated that because CH₄ through a catalysis of heated W-filament decomposed as C and H₂;Carbon.is absorbed on the surface of W-filament and its heat diffusion can enter into the interior of W-filament.H₂ is immedidately absorbed by Zr-Al getter.Then,a critical temperature measured for CH₄ decomposed is about 1700℃. However,electron impact with CH₄ would result in the additional decomposition and ionization, then CH₄ could be contributed to the absorption.The experiments have shown that,under W-filament temperature becoming 2063℃,when ionized current is 57 mA,pumping speed of Zr-Al getter pump for CH₄ is some 475ml/s,and specific speed is 16.8ml/s·cm².更多还原