【摘要】 本文研究了用⁷⁵A_s⁺离子注入的Al₂O₃膜的抗腐蚀性。Al₂O₃膜在磷酸中的最小腐蚀速率(或最佳的⁷⁵A_s⁺杂质浓度)能根据实验结果和类高斯离子射程分布得到。实验结果表明,注入离子的Al₂O₃膜在H₃PO₄—CrO₃溶液中的腐蚀率要比未注入的Al₂O₃膜在相同条件下的腐蚀速率小10倍以上。因此,甚至在酸中,离子注入在改善材料表面层的抗腐蚀性方面也是有希望的技术。更多还原

【Abstract】 Corrosion—resisting property of Al₂O₃ film implanted with ⁷⁵AS⁺ ions has been studied. A minimum corrosion rate, or a optimized As—doping concentration, of Al₂O₃ film merged into phosphoric acid solution is obtained according to the experimental results and Gaussian—like As ion range distribution. Experimental results indicates that the corrosion rate of the ion implanted Al₂O₃ films in the H₃PO₄—CrO₃ solution is reduced more than ten—foldl than that of the Al₂O₃ films unimplanted under same corroding conditions. Thus, it is clear that ion implantation would be a promising technique in the improvement of surface lager corrosion—resisting property of materials even in acid environme.更多还原