【摘要】 本文报导了高功率、高效率紫外光预电离KrF(λ=248毫微米)准分子激光器的实验研究.输出最大脉冲能量超过420毫焦耳.研究了KrF激光器的激光谱和荧光谱特性以及在混合气体中掺入Ne气的影响.更多还原

【Abstract】 Experimental studies on the high power and high effeeiency UV-preionized KrF (=248 nm) excimer laser are reported. The maximum output energy per pulse is over 420 mj. Characteristics of lasing and fluorescence spectrum for KrF are studied. The effect of additive Ne gas in the mixture on lasing energy is examined.更多还原