【摘要】 本文提出用化学腐蚀方法加工切型为x+5°,厚度为0.1mm 以下薄型石英音叉振子。该法是在镜面抛光的晶片双面分别蒸铬和蒸金,经涂胶后,双面可光刻出音叉的外形和电极线条,再经分层腐蚀后,在每个晶片上可得到几十乃至上百个音叉,再将音叉上架,调频后即可封装出可用于电子表中的微型振子。本文对上述流程中的工艺要点做了扼要说明并指出该法特点和发展前景。更多还原

【Abstract】 In this investigation,a chemical etch technique of fabricating thin quartzfork oscillators with thickness less than 0.1mm and cut type x+5°is presented.Using vapor chrome and gold to plate respectively on two sides of crystdribbon polished to a mirror finish,otlines of forks and electrode lines can be etcheaon the two sides after applyng a coat of glue.Tens to hundred forks can be obtainedon every crystal ribbon after laminated etching.Then mounting the forks andmodulating the frequency,they can be used to enclose in electronic watches asminiature oscillators.The main points of above-mentioned processing have been described briefly inthe paper.Meanwhile,the characteristics and developments of the technique have alsobeen pointed out here.更多还原