【摘要】 本文在部分相干条件下,研究了光学和电子显微镜的直边衍射和象质的评价及定量测试方法。描述了相应的实验装置,物理模型和数值计算结果。这些结果为显微(或微缩)系统的设计评价和装校测试提供了新的途径。更多还原

【Abstract】 This Paper deals with the evaluation of image quality and straight edge diffraction in optical and electronic microscope, and the method for quantitative measurement under partially coherent conditions. The corresponding experimental device, physical model and the calculated results are also described.更多还原