【摘要】 本文描述了对n一型锗进行阳极氧化的实验方法,得到了均匀的各种不同厚度的G_eO₂薄膜,采用了二种电解液:（1）醋酐65c.c.加上无水醋酸钠在醋酐中的饱和溶液5c、c;（2）醋酐500c、c加上21mgLiNO₃,实验证明采用后者得到较好的薄膜。膜的厚度测量是用光的干涉法得出。文章还叙述了阳极电位与时间的关系,氧化层厚度与时间的关系等规律,指出用这种方法可进行Ge扩散层中杂质浓度分布的研究,用适宜的条件,可以生长非常均匀的厚度达1000A以上的薄膜。更多还原

【Abstract】 Thick uniform germanium dioxide films of controlled thickness havebeen grown anodically on n-type germanium. The electrolytes used werea solution of anhydrous sodium acetate in acetic anhydride or an aceticanhydride containing LiNO₃. Good results were obtained for the anodicoxidation of germaniun in an acetic anhydride containing LiNO₃. The results about the growth of thick uniform germanium dioxide filmsformed by the anodic oxidation method were discussed.更多还原