【摘要】 旋转倾斜真空蒸发ＳｉＯ的方法能同时蒸镀多个基片，并且可在蒸发源和基片距离较短时蒸发。 拍摄了ＳｉＯ薄层的电子显微镜照片。用上述方法制作了三种液晶显示器件。更多还原

【Abstract】 In this paper, a method of vacuum evaporation sic onto a rotating tilt substrate is presented. This method enables more substrate to be evaporated simultaneously and with shorterd distance between the evaporation source and the substrate, Has been presented an electron microgaph of thin silicon monoxide film. Threeliquid crystal display devices using the new method are described.更多还原