【摘要】 本文对N型(111)高阻、P型(111)和N型(100)低阻硅单晶,进行了热处理实验,研究了氧含量和热处理温度对无位错硅单晶的电阻率、寿命和红外吸收特性的影响,确定了影响电阻率稳定性的氧含量值。更多还原

【Abstract】 The monocrystalline silicon, being taken such forms of high resistivityspecimen of N type（111）and low resistivity specimens of P type（111）and Ntype（100）, has been tested by heat treatment so as to investigate theeffectt of the O₂ contents and the treatment temperature upon the re-sistivity, the carrier life and the characteristic of infrared absorption of adislocation- free monocrystalline silicon. In addition, the effect of O₂ con-tents upon the stability of resistivity is considered.更多还原