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高通量微流控芯片的超快激光制备与集成技术研究

Ultrafast Laser Preparation and Integration of High Throughput Microfluidic Chips

【作者】 吴淼;

【导师】 程亚;

【作者基本信息】 华东师范大学 , 光学, 2023, 博士

【摘要】 微流控芯片连续流反应器具有反应效率高,安全环保、占地面积小、重现性高等特点,集成化的微流控芯片可以进一步提高连续流反应器的自动化和智能化程度,是一种公认的绿色化工使能技术。玻璃微流控芯片,由于其优异的光学性能及化学惰性等特点在化学、生物、医药等领域中具有天然性优势。为满足高通量需求非常需要一种三维加工技术以实现玻璃微流控芯片的三维定制化制备及集成。超快激光三维制造为实现该目标提供了可行性。本文针对高通量玻璃微流控芯片的超快激光制备与集成技术进行了研究,掌握了大尺寸三维玻璃结构的制备工艺,满足了高通量、集成化、定制化的应用需求。本论文主要研究结果如下:(1)获得了高通量三维玻璃微流控芯片微通道的高腐蚀速率制备工艺规律。本文研究了时域调控超快激光诱导透明材料改性过程对选择性腐蚀的影响;基于热累积理论与光热理论分析了腐蚀速率对脉冲宽度、重复频率、单脉冲能量、扫描速度以及扫描方向的依赖性,获得了大于1000μm/h高效腐蚀速率。在此基础上,提出了大尺寸结构三维制备过程中热累积问题的解决方案。为高通量微流控芯片制备提供了支撑。(2)实现了高通量三维微流控芯片以及微机械微流控芯片的制备。首先,本文设计了一种具有异手性双螺旋的三维微流控芯片并对其混合机制进行了解释,通过数值模拟与实验验证了该微流控芯片在大范围雷诺数条件下的高效混合特性。其次,本文制备了叶片直径为1.8 cm的高通量玻璃微机械微流控芯片,并实现了高通量状态下连续稳定性运行,最大流速可达400m L/min。(3)验证了超快激光制备微流控芯片技术在全自动连续合成中应用。利用超快激光技术制备了两种定制化的高通量微流控芯片,并基于此芯片建立了一种远程自动化连续合成系统。通过与互联网控制结合,以远程自动化控制的方式对疫苗颗粒进行了合成。所封装的疫苗颗粒能有效地促进树突状细胞的活化和成熟,实现了基于高通量微流控芯片的远程自动化连续合成在疫苗封装领域应用。(4)基于超快激光制备技术实现了集成光纤探针阵列三维高通量玻璃微流控芯片的实时光谱监测。该芯片由梯度浓度发生模块、反应模块、温度控制模块以及在线监测模块等多功能结构集成。将该芯片应用于化学合成领域进行了快速筛选研究。根据所采集的在线光谱信号可调节流速、反应物浓度以及反应温度实现了氧化锌纳米结构的高通量定制合成。

【Abstract】 Continuous flow reactor based on microfluidics has been recognized as an enabling technology for green chemical industry owing to its advantages such as high reaction efficiency,security,environmental protection,miniaturization and high reproducibility.Integrated microfluidic chips can further improve the automation and intelligence of continuous flow reactor.Glass-based microfluidic chips have an inherent advantage in chemistry,biology,and medicine because to their remarkable optical qualities and chemical inertness.To meet the high throughput demand,it is highly desirable to establish a three-dimensional fabrication technology which can enable customized design and fabrication of glass-based high-throughput microfluidic.Ultrafast laser 3D preparation capability provides the feasibility.In this paper,ultrafast laser preparation and integration technology of high-flux glass microfluidic chips were studied,and the preparation technology of large-size three-dimensional glass structures is mastered to meet the application requirements of high-flux,integration and customization.The following are the main research results of the work:(1)The process law of high corrosion rate of high flux glass 3D microfluidic chip microchannel was obtained.The effects of temporally controlled ultrafast laserinduced transparent material modification parameters on selective etching were examined.The dependencies of the etching rate on pulse width,repetition rate,singlepulse energy,scanning speed,and scanning direction were systematically analyzed on the basis of thermal accumulation theory and photothermal theory.The corrosion rate is higher than 1000 μm/h.On this basis the solution of heat accumulation problem was proposed.It provides support for the preparation of high flux microfluidic chips.(2)The high flux 3D microfluidic chip and the fabrication of micromechanical microfluidic chip were realized.First,a three-dimensional microfluidic chip with heterochiral double helix was designed and its mixing mechanism was explained.Numerical simulation and experiments both supported the fact that efficient mixing was possible for a wide range of Reynolds values.Secondly,the high throughput glass-based micromechanical microfluidic chip with blade diameter up to 1.8 cm was prepared.The continuous and stable operation under high flux condition was realized,and a maximum flow rate up to 400 m L/min.(3)The application of ultrafast laser microfluidic chip technology in automatic continuous synthesis was verified.Two customized high-throughput microfluidic chips were prepared using ultrafast laser technology,and a remote automatic continuous synthesis system was established based on this chip.By combining with internet control,the synthesis of vaccine particles was carried out in the way of remote automatic control,which successfully aided in dendritic cell activation and maturation.It was possible to use high-throughput microfluidic chips for remote automated continuous synthesis in vaccine packaging.(4)Based on ultrafast laser fabrication technology,real-time spectral monitoring of 3D high-flux glass microfluidic chip with integrated fiber probe array was realized.These chips achieve multifunctional integration in glass microfluidic chips by incorporating gradient concentration generating modules,reaction modules,temperature control modules and online monitoring module.It’s applied to the research of rapid screening in the field of chemical synthesis,the flow rate,reactant concentration and reaction temperature can be adjusted according to the collected online spectral signals to achieve high throughput customized synthesis of Zn O nanostructures.

  • 【分类号】TN492
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