【作者】 刘石；

【导师】 崔海宁；

【作者基本信息】 吉林大学 ， 光学， 2017， 博士

【摘要】 石墨烯是近年来发现的一种二维碳原子晶体,由六边形网状结构碳原子构成,原子之间结构的排列与石墨单原子层排列相同,它有着非常好的结晶性,是组成其它碳质材料不同维数的基本单元。其C-C之间以SP2键相连,具有大的比表面积。由于其具有独特的电子、光学、力学、热学性质而成为多个学科研究的热门材料,这些性质使石墨烯有着广阔的研究前景和巨大的可用价值,其在各个领域的也存在着极大的潜在应用。为了使石墨烯可以很大程度上的应用于多个领域中,成功有效的制备高质量的石墨烯成为了近年来很多人研究的热点。而化学气相沉积这种相对于其他制备石墨烯方法有很多优势的制备方法,被越来越多的研究者尝试和采用。为了更好探索石墨烯及其氧化物复合结构气相沉积法制备和其性能,本论文首先通过化学气相沉积法对石墨烯薄膜进行制备以及对他的各方面性能进行了探索。采用沉积系统低温沉积石墨烯薄膜,并采用旋涂、转移等方法进行目标基底转移,并对其进行表征。基于原有CVD法制备石墨烯薄膜设备存在的缺点和不足,在详细了解和熟练掌握实验原理及实验操作的基础之上,对原有装置进行研发和改造。通过对各部分组件进行添加、改造和连接,在温区的可控、电极控制和对气体的控制等方面进行实施,努力构造一套完整有序的化学气相沉积系统。其改造组件覆盖腔室内外部、连接操控面板及系统整体。通过示意图及实物图详细描述各部分改造组件的具体构成及连接方式。并利用该系统进行石墨烯薄膜的制备。利用磁控溅射手段,在已经制取的石墨烯表面生长一层氧化物,并对复合薄膜的性能进一步的研究。在ITO表面沉积WO₃薄膜,通过XRD观察WO₃薄膜的结晶度,利用扫描电镜对WO₃的表面形貌进行表征,用CorrTest测试系统进行电致变色性能的研究。采用石英振荡器和台阶仪对WO₃薄膜的厚度进行测量,并用光纤光谱仪对所制取的所制WO₃薄膜的透射率进行测试,对比在350nm-800nm波长范围内的透过率差。通过介绍AAO模板的形成机理和具体应用,详细说明在实验室条件下AAO模板的制备过程。利用两次阳极氧化法制备出规则的正六边形孔状结构。对比了不同实验条件下所制备的AAO模板的区别,包括实验过程中氧化的次数以及对最终制得模板的扩孔时间。为了制备石墨烯基氧化物有序孔结构复合材料,首先利用CVD法进行石墨烯薄膜生长以及石墨烯薄膜的转移。努力探索磁控溅射方法对不同氧化物的制备、在石墨烯基底上的沉积和在有序孔结构中的生长。更多还原

【Abstract】 Graphene which is found in recent years,a kind of two-dimensional carbon atoms in crystal,is made up of hexagonal mesh structure carbon atoms.It has the perfect crystalline,is the basic units to build other carbonaceous materials of different dimensions.It is the basic structure of zero dimensional fullerenes,one dimensional carbon nanotubes,such as three-dimensional phase graphite carbon,has many unique properties.Due to its unique electronic,optical,mechanical,thermal properties and become a multiple discipline research materials.These properties make graphene has a broad prospect of research and huge available values,there are huge potential application in many fields.In numerous methods of the synthesis of graphene,chemical vapor deposition（CVD）,as the main method of preparation of large area high quality graphene were well studied and widely used.In order to study the method of graphene oxide composite ordered structures by vapor deposition and its performance,this thesis use the method of chemical vapor deposition（CVD）,and graphene films preparation and the properties were studied.Copper foil as basal,methane as carbon source,using plasma enhanced chemical vapor deposition（PECVD）technique system deposit graphene films at low temperature.And by adopting the method of spin coating,transfer the preparation of the graphene films to the target substrate.Using Raman spectroscopy,scanning electron microscope（SEM）,transmission electron microscope（TEM）,X-ray diffraction phase analysis（XRD）,electrochemical workstation on the characterization.Because of CVD of graphene films prepared by the original equipment exist defects and deficiencies,in detailed understanding and mastering the experimental principle and the basis of experiments research,we have developed and transformed the original devices.To reform,add and link the component to each part In the control of temperature,control of electrode,control of gas arrangement,etc.Efforts to construct a set of complete and orderly preparation of graphene chemical vapor deposition system.The detailed schematic diagram and the actual diagram describe each part of the transform component,structure and connection mode.And use the system for the preparation of graphene films.Using the method of magnetron sputtering,growth in the preparation of the graphene surface oxide film,and study its performance.On the surface of the ITO deposit WO₃ thin films.Introduce the formation mechanism of the anodic alumina template and the concrete application,detailed in the preparation of porous anodic alumina process under the condition of laboratory.Orderly rules prepared by twice anodic oxidation method of hexagonal pore structure.Compare the difference between the anodic oxidation and the second preparation of anodic oxidation template.At the same time,comparison of different expanding time impact on anodic aluminum oxide template.For the preparation of Graphene-based oxide and composite Anodic Aluminum Oxide Template,using CVD method for graphene films growth and transfer of graphene films.Try to explore the magnetron sputtering method in the preparation of different oxides,Graphene-based deposition and its growth in the composite Anodic Aluminum Oxide Template.更多还原