【作者】 王洪昌；

【导师】 王占山；

【作者基本信息】 同济大学 ， 光学， 2007， 博士

【摘要】 极紫外和软X射线偏振测量开创了许多新的同步辐射实验方法，如：软X射线磁圆二色测量、软X射线元素分辨法拉第效应和克尔效应测量、自旋分辨的光电子和俄歇电子谱测量、磁畴显微镜、偏振散射测量以及软X射线偏振测量术等，这些方法为生物、医学、信息、材料、物理与化学等学科提供了强有力的研究工具。多层膜起偏器、检偏器和相移片是实现该波段偏振测量的关键元件。目前，美国、欧洲和日本等国已制成了可实用的多层膜偏振元件，并获得应用。我国对多层膜偏振元件一直缺乏系统研究，致使无法开展该波段的偏振测量研究。 极紫外和软X射线常规偏振光学元件是周期多层膜，本文探讨了其设计原理和方法，成功制备了Cr／Sc、Cr／C、La／B₄C、Mo／Y、Mo／Si反射式周期多层膜偏振元件和Mo／Y、Mo／Si透射式周期多层膜偏振元件，保证了北京同步辐射偏振测量装置在线调试和偏振测量，填补了我国在极紫外和软X射线波段偏振光学及其应用领域的空白。 针对极紫外和软X射线常规周期多层膜偏振元件带宽窄导致的测试困难的现状，本文首次提出了非周期多层膜宽带偏振光学元件的方法，克服了常规周期多层膜带宽窄、测试时元件需要平移或旋转的难题。采用恰当初始膜系和局部优化算法相结合，将优化时间缩短至几十秒，大大提高了优化效率，完成了非周期多层膜宽带起偏器、检偏器和相移片设计。采用磁控溅射方法研制了非周期宽带偏振光学元件，实验中成功解决了薄膜沉积速率精确标定和非周期多层膜制作过程中膜厚的精确控制问题，制备了13～19nm的Mo／Si与8～13nm的Mo／Y反射式宽带多层膜起偏器（检偏器），和相应波段的宽角“起偏器”（检偏器）：以及Mo／Si宽带相移片。 利用德国BESSY同步辐射的偏振装置实现了研制偏振元件的表征，测试主更多还原

【Abstract】 Polarized light in the extreme ultraviolet （EUV） and soft X-ray range is a valuable tool in the investigation of magnetic materials and magneto-optical effects, measurement of Faraday and Kerr effects, and polarization analysis of the synchrotron radiation. These polarizing measurements could be used in the study of a wide range of phenomena in biology, chemistry, physics, and material science. Such a demand increases the development of the polarizing components based on multilayer interference, which are the key optical elements in the measurement of the polarization for the synchrotron radiation. The multilayer polarizers, analyzers and phase retarders using different material combinations have been developed in American, European and Japanese groups. The polarization investigation in China has not been performed because of lacking the relevant polarizing components.The criteria and method for optimum polarization of EUV and soft x-ray multilayer polarizing optical components are presented. The Cr/Sc, Cr/C, La/B₄C, Mo/Y, Mo/Si reflective analyzers and Mo/Y、 Mo/Si transmission polarizers and phase retarders are fabricated using direct current magnetron sputtering. These optical elements can provide full control of the polarization of the incident light in x-ray spectroscopy. The Cr/C and Mo/Si reflective analyzers are used in the on-line alignment of the polarimeter in Beijing Synchrotron Radiation Facility （BSRF）, and the polarization state of the beam line 3W1B are measured.The traditional periodic multilayer polarizing components are effective over a very small wavelength range, and the narrow band wavelength and angular properties may be disadvantageous for some studies. In order to overcome this, the aperiodic multilayer structures have been developed based on a combination of analytical and numerical method, which is used in the design of supermirror in the hard X-ray range. The broadband Mo/Si and Mo/Y multilayer analyzers are deposited on the super-polished silicon wafer, and the broadband Mo/Si multilayer phase retarders are made using direct current magnetron sputtering on silicon nitride membrane. X-ray更多还原