【作者】 黄伟；

【导师】 周肇飞；

【作者基本信息】 四川大学 ， 机械制造及其自动化， 2006， 博士

【摘要】 本论文以国家重点实验室项目“高分辨率激光轮廓仪”以及军工预研项目“KDP晶体、非球面透镜等超精密加工表面亚纳米级微观形貌在位检测”中提出的要求为研究对象，针对一般纳米级分辨率测量仪器的不足，研究了用于在线测量的纳米级分辨率的高速激光轮廓仪。主要完成了以下工作： (1) 针对目前纳米级轮廓仪普遍存在的抗干扰能力弱，数据采集速度慢，对非平面被测面难以测量，不适合于在线检测等缺点，根据研究项目提出的要求，以“周氏”同轴式轮廓仪为原形，对激光稳频装置、光学结构、信号采集以及数据处理等方面加以改进和重新设计，形成了亚纳米级分辨率的高速在线轮廓仪。该系统采用微机控制数据采集与处理，实时显示测量结果，并对表面粗糙度各常用参数进行计算，然后绘出被测表面的轮廓图形。它能够解决要求无损伤、无污染的进行超精细加工表面测量问题，且其操作直观简便，测量精度高，重复性好。由于该系统具有杰出的抗振动干扰能力和低噪声性能，所以不需要特殊的测量环境，能够满足在线测量的需要，具有良好的通用性和性价比。 (2) 对轮廓仪光学测量部分进行了深入分析，得出了同轴式轮廓仪微观高度与测量相位差的关系。对光学系统进行了设计，主要包括：光束准直与滤波系统、参考光光路系统、测量光光路系统等。其原理是基于差动干涉原理，且其测量臂和参考臂同轴，这样就使得在垂直方向上的微小位移不会引起光程差，更多还原

【Abstract】 This thesis describes the research on the ultra-precision online measurement system. The research is based on two government projects, one is a State Key Laboratory project named ultra-precision laser profiling system, and the other is a military pre-study project named Micro-profilometer with subnanometer resolution for on-line measurement. The expected measured objects for this project are the KDP crystal and the nonspherical lenses. The research is focused on the following parts:1、 Aiming at the special questions related to the application of the coaxial profilometry in noncontact on-line measurement, the author has developed a new ultra-precision laser profiling system. This ultra-precision laser profiling system is based on the Zhou’s profiling system. In order to fit the requirement of on-line measurement, the optical and mechanical structure has been redesigned. And a new frequency-stabilised system was designed. This new ultra-precision laser profiling system used a PC as it main controller, and the measuring signal processing and the evaluation of ultraprecision machined surface roughness is based on the PC. It has更多还原