【作者】 刘斌；

【导师】 傅绍军； 王秋平；

【作者基本信息】 中国科学技术大学 ， 核技术及应用， 2006， 博士

【摘要】 同步辐射装置正处于蓬勃发展的新阶段，为适应同步辐射应用的新要求，发展同步辐射光束线技术成为重要的工作内容。单色器是光束线的心脏部分，而色散元件-光栅是单色器的核心元件，开展一些有关单色器的理论研究和光栅的检测等工作，对提高光束线单色器技术是有意义的。 另一方面，光束线中使用的光学镜一般表现为窄而长的形状，而且对它们的表面质量和形貌参数的要求也越来越苛刻，因此非球面轮廓测量系统的研制也成为同步辐射技术中一个重要的科研课题。 本文把研究内容定位于同步辐射的光束线技术，其中重点关注的是光束线的单色器理论及相关检测技术。近来，出于改善Dragon球面光栅单色器扫描需要移动出射狭缝较长，进而引起样品处光斑变化等缺点，人们提出了变曲率光栅单色器的概念。目前，该类单色器还处于研发阶段，鉴于其特点，展开有关研究工作是有意义的，并能为变曲率光栅单色器的实际应用奠定基础。长程面形仪(Long Trace Profiler)是专门为同步辐射大型非球面镜的轮廓测量而建立的绝对测试仪，LTP的研制是实验室申请的教育部211工程课题，作者参与了有关仪器的建设工作。在此基础上，开展了基于长程面形仪的光栅刻线密度高精度测试系统的研究工作，由于它能同时检测光栅的面形和刻线密度，是一种比较突出光栅测试技术。作者的主要研究内容有以下几个方面： 一、变曲率光栅的成像特性研究 变曲率或压弯光栅单色器是最近兴起的一种新型单色器，它采用了改变光栅曲率半径的方法，在光谱扫描过程中在满足聚焦条件的同时，保持出射狭缝不动，具有鲜明的特点。这种面形可以控制的光栅是最近出现的，人们对它的成像特性研究也尚为欠缺。 作者推导了任意面形压弯后光栅线密度的变化与弯曲面形之间的数学关系，更多还原

【Abstract】 The technical innovation becomes vigorously forging ahead in the beamline with the rapid development of the synchrotron radiation (SR) facility and its applications. Monochromator, acting as the core component in SR beamline, mainly consists of the entrance slit, exit slit, dispersion unit and reflection mirror. Wherein, the dispersion unit, diffraction gratings, is the important element, which mostly determines the performance in monochromatizing SR. So it is necessary and imperative to develop the theory of SR monochromator related metrology technology for diffraction gratings.On the other hand, the development of SR puts greater demands on surface quality, figure and shape parameters of the optical elements used in beamline. Meanwhile, the unique characteristics of these optical elements are generally narrow but long shapes. Therefore, novel surface measurement method and measuring system should accordingly enhance to cope with the increasing requirements in SR.This article locates the research content in SR technology, and pays attention to the SR monochromator theory related metrology technique. In the constant deviation angle spherical grating (Dragon) monochromator, the exit distance usually moves seriously and changes the value of SR at the sample position uncertainly. More recently, to minimize the far movements of the exit distance during scanning process, bending of gratings into weak cylindrical or polynomial surfaces has been analyzed or designed. Whereas it is still the primary time to research on a bending-grating-based monochromator, it is meaningful and significant to derive the imaging properties of a bending grating, furthermore for its practical application in SR beamline. The long trace profiler (LTP) is a useful and absolute optical metrology instrument capable of measuring surface profile of very long dimension, especially for SR optical elements. The development of the long trace profiler is supported by project 211 from the Ministry of State Education and the author participated some related constructions. Affording to detecting the slope error and groove density of a diffraction grating, the long trace profiler takes advantage in optical metrology for these kinds of optical elements, As a sequence, it is necessary to establish a LTP method to measure the groove density of diffraction gratings. The main research content divides to several aspects as follow:1. Research on imaging properties of bending gratingBending-grating-based monochromator is a mostly novel concept in SR beamline, superiority in a fixed exit slit with an adjustable curvature or changeable surface profile to satisfy the focusing condition during scanning. This kind of grating whose surface can be controlled and bent to desirable figures, named as bending grating, appears lately. Therefore, research on imaging properties of bending gratings更多还原