【作者】 郝秀春；

【导师】 王立鼎； 褚金奎；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2006， 博士

【摘要】 微夹钳是MEMS应用领域的一个重要执行器件，在微装配、微操作等方面扮演着重要的角色。研究和开发适用于微型零件操作和装配的微夹钳，是实现微系统科学实验与产业化的一个关键环节，近年来已成为微纳米技术研究领域的一个重要方面。从设计方法上对微夹钳进行的研究不是很多，鉴于微夹钳缺乏系统级设计方法的现状，本文从微夹钳的设计入手，把拓扑优化方法和伪刚体模型法引入到微夹钳设计中，设计出多种新型结构的微夹钳，并系统地进行了制作工艺研究、特性分析和实验验证。 综合分析国内外微夹钳研究现状，并结合MEMS中的要求，确定本文设计的微夹钳采用电热驱动方式。V形梁阵列式电热驱动器为钳体部分提供输入位移，钳体部分应用拓扑优化方法和伪刚体模型法进行了系统的设计，以实现对输入位移的放大变换。 基于应变能概念，用虚拟载荷模拟工件阻力，建立了多负载工况的拓扑优化数学模型，并用优化准则法求解出两种放大倍数分别为7.4和10的新型柔性微夹钳；基于互能概念，建立了以互能与应变能之比作为目标函数拓扑优化数学模型，用移动渐近线法求得一种放大倍数为18的新型柔性微夹钳。 根据电热驱动微夹钳的特性，总结出可转化为微钳体的刚性机构应满足的拓扑要求，利用机构的类型综合方法设计出满足拓扑要求的六杆、八杆和十杆刚性机构。并根据求得刚性机构利用伪刚体法求得伪刚体机构和柔性微夹钳机构，得到四种新型的放大倍数分别为50、20、18、和6的微夹钳。 用Coventor Ware和Ansys，对V形电热驱动器和电热驱动微夹钳进行性能分析。讨论了V形电热驱动器各几何参数对其性能影响，并确定出合适的几何参数。具体分析了多种镍电热驱动微夹钳和多晶硅电热驱动微夹钳的钳口输出位移、表面温度随输入电压的变化情况，以及夹持力随钳口位移的变化情况。这对微夹钳的实际尺寸确定和实验研究有重要意义。 对微夹钳制作的UV-LIGA工艺和体硅工艺进行了研究，用正交实验法得到最优的SU-8胶铸模的工艺条件。电铸种子层的材料、SU-8胶的曝光时间、SU-8胶的前烘时间、SU-8胶的后烘时间、SU-8在基片的表面不平度以及电流密度都是影响UV-LIGA工艺的重要因素，本文就这些影响因素进行详细讨论并给出解决方法。用UV-LIGA工艺制作出深度30μm，最小特征尺寸10μm的多种结构的电热驱动镍微夹钳。最后搭建实验台，对电热驱动微夹钳进行了性能测试，测试结果表明达到设计要求。 本文研究主要为微夹钳的设计和制作提供了系统的方法，该方法可以推广到更多的微执行器的设计中，并且设计、制作出的电热驱动微夹钳有优良的性能，可以应用到MEMS的操作领域。更多还原

【Abstract】 Microgripper is one of the key elements in MEMS, and acts as an important role in microrobotics and microassembly technologies for handling and manipulating microobjects. To research and develop microgripper applied in microoperation and microassembly is a key factor for bringing about industrialization in MEMS. Because of its importance and widespread application, in recent years has become one of important fields of micro-nano technology research. However methods for designing microgripper have not been studied extensively. The overall design scope of most microgrippers developed in recent years lack a systematic mechanism design approach. This thesis is focused on design of microgripper, as well as the related researches including simulation, fabrication and test are done.After analyzing the current research achievements, and combined with the requirements of MEMS, in this thesis, the microgripper is based on electrothermal principle. V-shaped beam array electrothermal microactuator is adopted to generate displacements for microgripper, and the micropper is designed by topology optimization and pseudo-rigid-body model.The mathematics model of multiple loading case is established based on strain energy (SE), in which, a dummy load is applied at the output point to model the resistance of the workpiece, and the compliance is regarded as the objective function. Two kinds of compliant microgrippers with amplification ratio of 7.4 and 10 are obtained by OC (Optimization Criteria) method for solving the model. As well as, the mathematical model of topology optimization is established based on the principle of mutual potential energy (MPE), in which, the ratio of MPE to SE is regarded as the objective function. A compliant microgripper with amplification ratio of 18 are obtained by the method of moving asymptotes (MMA) for solving the model.According to property of the electrothermal microgripper, the topology requirements for gripper mechanism are summarized. Six-bar, eight-bar and ten-bar mechanisms are obtained with the type synthesis of a kinematic chain. And four kinds of microgrippers with amplification ratio of 50, 20, 18 and 6 are obtained based on the pseudo-rigid-body microgripper mechanisms, on that obtained by pseudo-rigid-body model based on the rigid mechanisms.Performance analysis of V-shaped electrothermal actuator and the electrothermal microgrippers with noval structures is achieved by Coventor Ware and Ansys. The geometric parameters of V-shaped electrothermal actuator are discussed, and appropriate parameters are confirmed. In respect of polysilicon and nickel electrothermal microgrippers, the changes of更多还原