【作者】 冯晓梅；

【导师】 张大卫；

【作者基本信息】 天津大学 ， 机械电子工程， 2005， 博士

【摘要】 本文以开发面向IC封装的高速、高精度定位系统为目标,以有限元方法、动态设计方法、机械动力学等理论为手段,系统深入地研究了两自由度笛卡尔坐标型高速、高精度定位平台的创新结构设计、动力学建模以及控制算法等关键技术,并建造出XY精密定位平台样机一台。取得如下创造性成果:将有限元分析方法和机械系统动态仿真相结合,提出一种具有我国自主知识产权的,采用直线音圈电机直接驱动的两自由度笛卡尔坐标型高速、高精度定位平台,并采用新型弹性解耦机构,从而将驱动部件置于底座上,减轻了运动部件的重量,降低了惯量,同时具有传统XY精密定位平台运动学解耦的特点。提出了XY精密定位平台静、动态特性的有限元分析方法。探讨了XY定位平台在不同载荷情况下的力学行为,分析了XY定位平台的固有频率和模态振型,在此基础上实现了对XY定位平台的结构动态设计。将X轴向和Y轴向定位平台等效为集中质量系统,分别建立了X轴向和Y轴向定位机构的动力学模型。利用拉普拉斯变换及其反变换方法,得到了两轴向定位平台在阶跃控制信号和脉冲控制信号下的位移动态响应函数,以及阶跃控制信号和脉冲控制信号下的速度动态响应函数。研究了它们在不同控制信号电压下的响应变化规律。建立了直线音圈电机的动态方程,提出了基于速度PID控制的直线音圈电机传递函数,设计了控制器参数。在此基础上,构造了基于直线音圈电机的X轴向定位平台机电耦合控制系统模型,深入分析了基于位置PID控制器的定位平台机电耦合系统闭环控制算法。基于上述研究成果,建造出基于直线音圈电机直接驱动采用新型弹性解耦机构的XY精密定位平台样机一台。样机具有很高的运动速度和极高的运动加速度和定位精度,单轴机构稳定时间很短。目前,该样机已经通过国家高技术研究发展计划(863计划)专家组的验收。更多还原

【Abstract】 In order to develop a high speed and high precision positioning table for ICpackaging, this dissertation deals with the key issues relevant to mechanical design,dynamic modeling and control algorithm by means of dynamic design theory, finiteelement method and mechanical dynamics. As a result, a prototype machine of XYtable has been developed. The following creative works have been completed. Combining finite element method with the mechanical system dynamicsimulation method, a voice coil actuator direct-drive high speed and highprecision XY table patented has been developed. A new flexible decouplingmechanism is proposed to use in the table. So the driving element can bemounted on the base and the moving inertia has been reduced. Meanwhile, thetable is of conventional XY precision table kinematics decoupling characteristic. The finite element method is used in analyzing the static characteristics anddynamic characteristic of the XY table. The performance of the XY tablesubjected to different load has been studied and the natural frequency and modalshapes of the XY table have been obtained. Based on the results, the dynamicstructural design has been implemented. Considering the precision positioning table as lumped mass spring system, thedynamic model of X axial table and Y axial table has been developedrespectively. The analytic solution of displacement step responses anddisplacement impulse responses of the X axial table and Y axial table have beengiven by use of Laplace transform method. And the analytic solution of velocitystep responses and velocity impulse responses of the X axial table and Y axialtable have also been given. The dynamic model of the linear voice coil actuator is formulated, the transferfunction based on velocity PID controller of the voice coil actuator has beenpresented, and the parameters of the controller have been designed. The voicecoil actuator model together with the dynamic model of the mechanical systemallows the transfer function of the system as a whole to be developed. Thetransfer function based on displacement PID controller of the electromechanicalcoupling control system has been proposed. The above outcomes have been used for the development of a prototype machineof XY table. The XY table with high positioning accuracy and high dynamicperformance also can reach very high speed and acceleration. The prototypemachine has been checked and accepted by the expert committee of The NationalHigh Technology Research and Development Program of China (863 Program).更多还原