【作者】 吕晓旭；

【导师】 张以谟；

【作者基本信息】 天津大学 ， 光学工程， 2004， 博士

【摘要】 光学相位测量作为一种高精度测量技术,被广泛应用于许多科学研究和工程应用领域的位移、形变、密度的分布及变化的精密测量中。其突出的优点是能够解决表面或相位分布不规则、变化不均匀、变化量微小情况下的测量问题,满足对测量的非破坏、非干预、高精度和自动化要求。在相位测量理论、自动化抗干扰高精度相移系统的研究与应用、相移算法、相位测量结果的评估等方面仍然有许多需要研究的问题。 本文从理论分析、相移相位测量系统的设计及研制、相移相位测量方法的实验研究三个方面,对相位测量中的一些理论、相移相位测量中的相移技术、静态相移相位测量方法、动态相位测量方法等方面的问题进行了研究。 本文中主要的创造性工作为:1、 从全息术的观点对一个相移周期内作 N 步均匀相移的 N 步满周期相移相位 测量方法进行了讨论,证明了 N 步满周期相移相位测量方法的实质是一种同 时实现复振幅分离和同态叠加方法,用全息方法可以实现用非平面参考光波 进行相位测量和对衍射物体的相位测量。2、 设计和建立了一套相移相位测量系统,该系统用激光的波长作为长度计量标 准,具有 PZT位移—电压特性测量、相移区间的选择与标定、相移驱动控制、 相移图像采集控制、相移过程监测等功能。3、 在 N 步满周期相移全息相位算法基础上,提出了一种相移相位测量的误差估 计方法。证明了相位测量误差与最大相移误差的平方成正比,与相移的步数 N 成反比,增加相移的步数可以降低相移误差和其它随机因素对测量结果的 影响。4、 提出一种用相移与空间最小二乘拟合方法结合,进行动态过程相位测量的方 法,可以从单幅条纹图中计算出相位分布,结果达到与相移方法相同的精度。更多还原

【Abstract】 Optical phase measurement is a high accuracy phase measuringmethod which is widely used in displacement testing, object distortionand density distribution analysis etc. For the measuring object withnon-regular surface and phase distribution, non-uniform and small change,optical phase measurement can develop it’s advantages and fulfill therequirement of non-destructive and non-contact testing, high precisionand automatization. Up to now, some problems remain in the phasemeasurement including: phase measuring theory development,phase-shifting phase measuring system with high precision and goodcapacity from preventing noise, phase-shifting algorithm and how toevaluate the phase measuring error. By theoretic analysis, phase-shifting phase measuring system’sdesign and the corresponding experiment, this paper gives some researchabout the phase-shifting phase measurement including: phase measuringtheory analysis, phase-shifting technique, how to evaluate phasemeasuring error, phase-shifting phase measuring methods of static anddynamic process. In this paper, the main innovative ideas are as following:1. By use of the point of view of holography, a phase-shifting phasemeasuring method of N-steps full period phase-shifting in a period isproposed, which is equal to that of separation and superposition ofcomplex amplitude synchronously, and can be used in the phasemeasurement of the diffracting object by non-plane reference wave.2. A phase shifting phase measuring system is designed, in which thelaser wavelength is used as the measuring standard of length, therelationship between the displacement of PZT and the voltage can bemeasured, the phase-shifting region can be chosen and calibrated, andphase-shifting driver and phase-shifting images recording can becontrolled , and the phase-shifting process can be inspected.3. By use of N-steps full period holographic phase-shifting algorithm, anevaluating phase measuring error method is proposed, and it is proved thephase measurement error is directly proportional to the square of the<WP=5>maximum of phase-shifting error, and is inversely proportional to thephase-shifting step number N. If N is increased, the influence forphase-shifting error and other random factors to phase measuring resultwill be decreased.4. By combining phase-shifting technique with least-squares fittingalgorithm (CPSLSF), a novel method of phase measurement of timesequence of interferograms is proposed, and the experimental resultshows the phase measuring accuracy of the proposed method is the sameas that of the conventional phase-shifting method.更多还原