【作者】 郭军；

【导师】 谢铁邦；

【作者基本信息】 华中科技大学 ， 机械制造及其自动化， 2004， 博士

【摘要】 工程表面的测量和评定是当今计量学领域的研究热点。本文在总结当今表面形貌测量及评定方法的基础上,系统地论述了作者在工程表面形貌测量及评定方法上取得的研究成果。主要研究内容与创新如下:在对传统的Form Talysurf光学轮廓仪进行重大改进的基础上,研制了适合工程表面形貌测量需要的大量程、高精度触针式激光干涉HST光学轮廓仪。该系统垂直测量范围10mm,垂直测量分辨率0.01μm。二维工作台行程40mm×40mm,最小步距0.5μm。其主要改进及创新如下:(1)将传统的Form Talysurf光学轮廓仪的动触针式扫描改为动工作台式扫描,解决了原系统在使用过程中的稳定性不佳的问题;(2)采用绝对零位与查找表相结合的方法消除了原系统中存在的非线性理论误差,使本文研制的HST光学轮廓仪具备大量程,高精度的特点;(3)采用共基面二维工作台,解决了原系统不具备二维测量基准面的问题;(4)研制了基于CCD的分级干涉细分装置,提出了通过傅立叶功率谱计算CCD接收干涉条纹初相位的方法,使传感器的测量分辨率从原来的λ/4提高到λ/100。该轮廓仪可满足目前绝大多数工程表面形貌测量的要求,且结构简单,成本较低。在传统的二维MOTIF评定基础上,提出并实现了MOTIF滤波器,与通常的中线制滤波器相比,MOTIF滤波器是一种无相移,具有鲁棒性的自适应最优滤波器。提出了一套完整的3D-MOTIF评定体系,给出了3D-MOTIF及相关参数的定义,详细论述了3D-MOTIF的合并算法,并进行了实例演示。本文提出的3D-MOTIF评定体系克服了已有的3D-MOTIF评定体系中存在的一些问题,为三维表面的评定提供了一种新方法。更多还原

【Abstract】 Engineering surface texture Measurement and evaluation is a hot researching area in metrology today. After summarize the development history of surface texture measurement and evaluation methods, this thesis narrates some achievements in the measurement and evaluation of engineering surface texture systematically.Based on remarkable improvements on the traditional Form Talysurf optical profiler, a long range, high precision measuring instrument needed for measurements of engineering surface texture is developed. Its main improvements and innovations are as follows:(1) By changing the moving tip measurement style into the moving work-table measurement style, this thesis solves the problem of unstable in measuring stage consist in the original system;(2) By using the absolute zero position combined with a look-up table method, this thesis eliminates the systematic nonlinear error in the original system; make the HST optical profiler developed by this thesis having the characteristic of long range and high precision;(3) By using the common base level two dimensional work-table, this thesis solves the problem of less of a two dimensional measuring datum plane in the original system;(4) This thesis develops a grading subdivision interference pattern receiver based on CCD, and proposes a method using the Fourier power spectrum to determine the initial phase of the interference pattern received by the CCD.This thesis designs and implements the HST optical profiler used in engineering surface texture measurements, realizes the high precision measurements of engineering surface texture. Its vertical measuring range is 10mm, and its vertical resolution is 0.01μm. The working range of the two dimensional work-table is 40mm×40mm, the minimum moving step is 0.5μm. This profiler can satisfy most of the measuring requirements of the engineering surfaces today, the structure is simple, and its cost is low.This thesis also studies two of the key problems of two dimensional MOTIF evaluation algorithm. (1) Based on the structure of single link list, a full and high performance MOTIF combination algorithm is implemented; (2) Based on the traditional MOTIF evaluation method, a MOTIF filter is proposed. According to the common <WP=5>M-system filter, MOTIF filter is a non-phase shift, robust, adaptive and optimal filter.This thesis proposes a completed three dimensional MOTIF evaluation system, presents the definitions of three dimensional MOTIF and its associated parameters, describes the three dimensional MOTIF combination method in detail, and demonstrates the results with some examples. The three dimensional MOTIF evaluation system proposed by this thesis solves some problems existed in current three dimensional MOTIF evolution systems, provides a new method to evaluate three dimensional surface.更多还原