【作者】 崔玉国；

【导师】 孙宝元；

【作者基本信息】 大连理工大学 ， 机械电子工程， 2003， 博士

【摘要】 压电陶瓷执行器微定位技术具有许多其它微定位技术无可比拟的优点，从而获得了广泛的应用。本文将压电陶瓷执行器用于驱动工作台，为提高压电微动工作台的动静态性能，进行了如下的相关研究。 在系统分析电致伸缩效应、逆压电效应和铁电效应位移机理及对位移贡献的基础上，基于电畴转向与转向不完全立即可逆的观点，深入分析了压电陶瓷执行器迟滞非线性的成因，表明非180°电畴转向与转向的不完全立即可逆，分别是造成压电陶瓷执行器非线性和迟滞的根本原因。通过实验研究了压电陶瓷执行器在不同情况下的迟滞非线性。实验结果表明：随着驱动电压幅值的增大，压电陶瓷执行器的迟滞和非线性增大；随着驱动电压频率的增大，压电陶瓷执行器的迟滞和非线性仅略微增大； 随着驱动循环次数的增加，压电陶瓷执行器的迟滞和非线性逐渐减小。 基于压电陶瓷执行器位移-电压曲线各升程之间、各回程之间的相似性，采用坐标变换的方法，建立了一种新的简单实用的压电陶瓷执行器的迟滞非线性模型。在模型的实现过程中，为了避免求解病态方程组，采用基函数为正交多项式的最小二乘法来拟合压电陶瓷执行器的迟滞非线性模型。实验结果表明：在不同的电压驱动过程、不同的驱动电压频率以及不同的驱动循环次数下，模型均能够很好地跟踪实测值。 从基本压电方程出发，推导出压电陶瓷执行器中晶片上的自由电荷中包含执行器的位移信息，进而提出一种新的基于积分器电路的压电陶瓷执行器位移自感知的方法。该方法使得电路的调节和感知信号的获取变得容易，很好地克服了基于电桥电路的自感知方法的不足。实验结果表明，在不同的驱动电压波形、不同的驱动电压频率下，基于积分器的自感知压电陶瓷执行器均能够很好地检测出执行器的位移信号。 在准静态或低频情况下，对压电微动工作台进行了动力学分析，得出它为电学上的一阶惯性环节和机械上的二阶振荡环节的串联。进而给出了提高压电微动工作台响应速度的途径，即：一方面，应在不引起压电陶瓷执行器击穿的情况下，尽量减小电源内电阻的阻值；另一方面，应在保证刚度的情况下减小工作台运动部分的质量， 以及在保证最大期望输出位移的情况下增大柔性铰链的刚度。分析了预紧力对压电微动工作台刚度、固有频率以及输出位移的影响。为使压电微动工作台具有良好的动静态性能，应根据实验来确定合理的预紧力。推导出压电微动工作台的迟滞非线性模型同压电陶瓷执行器空载时的迟滞非线性模型具有相同的形式，但其输出位移相对于压电陶瓷执行器空载时的输出位移按一定的比例缩人连理工人学博_!:学位论文中文摘要小。基于钢球冲击法测试了压电微动工作台X向和Y向的固有频率，测试结果表明:压电微动工作台双向的固有频率均高于IkHz。 为有效地减小积分饱和并降低对扰动的敏感性，使压电微动工作台在控制系统的作用下，响应快，超调小，稳态精度高，构造了一种带有迟滞非线性模型前馈补偿的弱积分与加权微分PID控制算法。给出了PID控制器的整定方法及采样周期的确定原则。由于自感知方式具有许多独立传感器测量方式所无可比拟的优点，所以在采用压电陶瓷执行器对工作台进行驱动时，控制系统中反馈方式采用基于积分器的自感知反馈方式。实验结果表明:具有前馈补偿的弱积分与加权微分PID自感知反馈控制，具有良好的控制性能。更多还原

【Abstract】 Piezoceramic actuator micro-positioning technology exhibits remarkable properties than other micro-positioning ones, so it is widely used. This paper employs piezoceramic actuator to a drive table to improve static and dynamic performance of the piezoceramic micro-positioning table. The following related aspects have been studied.On the basis of systematic analyses of electrostrictive effect, inverse piezoelectric effect, the displacement mechanism and displacement contribution by ferroelectric effect, the causes of hysteresis nonlinearity of piezoceramic actuators have been intensely studied from the viewpoint of rotation of ferroelectric domain and incomplete reversibility of the rotation. The results show that rotation of ferroelectric domain and incomplete reversibility of the rotation are the fundamental reason of. hysteresis nonlinearity of the piezoceramic actuator. The hysteresis nonlinearity of piezoceramic actuators under different conditions has been studied. It can be found: as the amplitude of driving voltage increases,the hysteresis and nonlinearity of the piezoceramic actuator also increase; as the frequency of drivubg voltage increases,the hysteresis and nonlinearity of the piezoceramic actuator only increase a little; with the increasing of driving repetition times,the hysteresis and nonlinearity of the piezoceramic actuator gradually decrease.Based on the similarity of the displacement-voltage curves when driving voltage increases and decreases, a method of coordinate transformation has been adopted to set up a new type of simple and applicable hysteresis nonlinearity model of piezoceramic actuator. In order to avoid solving morbid equations, the method of least squares, whose basing function are orthogonal polynomials, is used to fit the hysteresis nonlinearity modeling of the piezoceramic actuator. The experimental data show that under different amplitudes, different frequencies and different repetition times of driving voltage, the modeling can accurately track the measuring values.According to the basic piezoelectric equations, the displacement information that is contained in the free charge of the wafers of the piezoceramic actuator is deduced, and then a new piezoceramic actuator displacement self-sensing method based on integral device circuit is brought forward. It is convenient to adjust circuit and easy to acquire sensing signal. It also overcomes the difficulty of the self-sensing method based on bridge circuit. The experimental results indicate that with the conditions of the different wave forms of driving voltage, different driving frequencies anddifferent driving repetition times, the self sensing piezoceramic actuator based on integral device circuit can effectively measure displacement signal.Under the quasiostatic or low frequency conditions, we discuss the dynamic characteristics of the piezoelectric micro motion worktable, and obtain that it can be considered as the series of a first-order inertia element and a second-order surge element. We also analyze how the pre-force influence on the rigidity, natural frequency and output displacement. In order to increase the response speed of the micro piezoelectric table, two measures have been given. The first method is decreasing resistance of the limiting current resistance, preconditioning the piezoceramic actuator not to be broken-down; the second one is decreasing the mass of the movement components of the worktable, and increasing the rigidity of the double elastic parallel plank, but the integer rigidity should be kept. Also the influences of the pre-force to the worktable rigidity, the natural frequency and the output displacement have been analyzed. To maintain static and dynamic properties of the piezoelectric micro motion worktable, we choose the rational pre-force through experiments. We find the hysteresis nonlinearity model of piezoelectric micro motion worktable is similar in form to the hysteresis nonlinearity model of piezoelectric actuator without load, but its output displacement is smaller than that o更多还原