【作者】 罗元；

【导师】 黄尚廉；

【作者基本信息】 重庆大学 ， 仪器科学与技术， 2003， 博士

【摘要】 基于光纤的全光网络，是新一代高速宽带综合业务网的首选方案，全光光开关是全光网络的基石，MEMS光开关则是众多光开关方案中竞争力最强的技术之一，因此，开展MEMS光开关关键结构及其性能的研究，有着重要的理论意义和潜在应用价值。本文对2D MEMS光开关的关键技术进行了探讨，采用体微加工和表面微加工技术和新型MEMS结构材料，研制出2D MEMS光开关的微镜及其驱动结构，主要研究工作如下：系统地对MEMS技术，尤其是MEMS微加工技术进行了研究，为MEMS器件设计奠定理论基础。系统地研究了MEMS光开关的核心技术－微镜结构与驱动技术，选定了静电直接驱动水平扭力式微镜光开关单元为研究重点。对以多晶硅为结构材料的静电直接驱动水平扭力式微镜光开关进行尺寸设计和工艺设计，并对其制作进行工艺实验研究，尤其是DRIE的替代工艺－TMAH湿法深槽刻蚀技术，提出了TMAH湿法深槽的工艺参数，实现了与集成电路工艺兼容的MEMS体微加工工艺。对多晶硅微镜进行应力实验，认为减小和消除多晶硅薄膜的残余应力成为多晶硅微镜技术的关键。对非硅结构材料的静电直接驱动水平扭力式微镜光开关进行研究，提出了镍铬金微结构方案，并进行了理论分析和实验研究，成功地制作出基于硅基的镍铬金光开关单元，并对其进行了测试，包括微镜表面粗糙度、微镜的反射率光谱曲线、微镜的静电驱动扭转及循环实验等，测试结果表明，该光开关微镜单元光学性能良好，在15V电压驱动下可实现15度的扭转，性能稳定，可实现光开关功能。对电极进行改进，对采用倾斜电极结构的光开关单元进行了理论分析，计算结果表明，改进后的结构将有助于进一步降低驱动电压，对提高光开关工作的稳定性与可靠性也是有利的。本文的主要创新点包括：1、提出TMAH湿法刻蚀代替DRIE的工艺技术，并得到了TMAH刻蚀光滑表面的一组重要工艺流程参数。2、提出了采用镍铬金材料的金属微镜光开关结构方案，得到镍铬金光开关微镜单元，通过测试表明该微镜单元光学性能良好，机械性能稳定，能够实现光开关功能。<WP=6>通过本文的研究，采用镍铬金材料制作的金属微镜单元具有良好的光学性能和机械性能，能够实现光开关功能，对2D MEMS的研究及其实用化，具有重要意义。更多还原

【Abstract】 All optical network (AON) is a preferred way of new generation wideband network and optical switch is the key technology for AON. Among various schemes of optical switches, MEMS optical switch is the competitiveness one. Study on the key structure and characteristic of MEMS optical switches has important theoretic meaning, applied value and marketable foreground. This dissertation discusses the core technologies of 2D MEMS optical switch. By using bulk and surface micromaching process, a novel micromirror with its driving structure is made with new structure material. The main researches points in the dissertation are as followings:The basic technology and methods for MEMS process is researched to serve as the theoretic basis for design of MEMS devices. After theory and simulation analysis on the schemes of micromirror and driving structures, which are the core technologies of MEMS optical switch, a static electricity driving horizontal torsion mirror optical switch has been selected as the mean research point. The sizes and process design of a static electricity driving horizontal torsion mirror optical switch has been done to make a prototype. Bulk micromaching experiments have been down to find a new TMAH wet deep etching process. A set of process parameters are pointed out to ensure that the TMAH wet deep etching can have smooth etched surface. The novel MEMS bulk maching process is compatible with IC process. Experiments on residual stress of poly-silicon micromirror have been done to know the effect of stress on the characteristics of micromirror. A conclusion has been made that residual stress control of poly-silicon micromirror is very important to make a useful poly-silicon micromirror. A novel Ni-Cr-Au micro-structure scheme is brought forward after research on the silicon-based non-silicon optical switch. By theoretic and experimental analysis, a Ni-Cr-Au optical switch unit is fabricated successfully. Measuring experiments have been done on the Ni-Cr-Au micromirror for electrostatic driving torsion mirror optical switch. The measurements items include the roughness of the micromirror, the reflectivity spectral curve, the driving experiments and cycle experiment. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 15 degrees at voltage less than 15V. This kind of novel mirror will have good potential applications for MEMS optical switches.<WP=8>According to the measurement results, the electrode has been improved and a tilt electrode scheme has been researched theoretic. The theoretic analysis shows that tilt electrode help to reduce the driving voltage and improved the stability and reliability of optical switch.The main creative points in the dissertation are as followings:1、A process of TMAH wet etching is brought forward to replace DRIE and a set of very important parameters for TMAH etching is achieved to ensure that TMAH etching can have smooth surface. 2、A novel Ni-Cr-Au micromirror for optical switch has been researched. The Ni-Cr-Au micromirror unit has been fabricated. The measuring result shows that the mirror has good optical performance, stable mechanical property and can achieve optical switch function. This dissertation shows that Ni-Cr-Au micromirror for optical switch has good optical performance, stable mechanical property and can achieve optical switch function. The novel optical switch scheme has very important meaning for the research and practicalization of 2D MEMS optical switch.更多还原