【作者】 顾文韵；

【导师】 张保民； 皮德富；

【作者基本信息】 南京理工大学 ， 光学工程， 2002， 博士

【摘要】 由于非致冷红外焦平面阵列系统具有重量轻、无需致冷、成本低等优点，有广泛的军用和民用市场，因而这项技术是一个行之有效的发展新方向。本课题即针对非致冷红外焦平面探测器开展研究工作。 课题的重点放在非致冷微测辐射热计焦平面阵列，这种非致冷红外产品的设计研制工作包括：设计和模拟工具的研究、材料选择和器件制作工艺的研究、探测器和读出电路的设计研究、真空封装和性能表征的研究等。作者主要进行了探测器模型仿真及其应用研究的工作，论文的主要内容如下： 进行了微测辐射热计焦平面阵列的理论研究。对两种非致冷焦平面阵列进行了细致地比较。并主要针对非致冷微测辐射热计阵列展开研究，详细分析了影响非致冷微测辐射热计总体性能的探测器材料特性、结构特性、信号读出和处理电路特性以及基本制作工艺，对各项研究工作做了系统地阐述。 对微测辐射热计阵列的探测器像元建立了数学模型，对其结构特性和光电特性进行计算机模拟仿真和优化设计。不仅建立了简单数学模型，并在此基础上提出并建立了更加精确的数值计算模型—有限元数学模型，编制了一套专用的热分析软件，利用它分析了非致冷微测辐射热计热绝缘结构的基本稳态和非稳态特性，为探测器优化设计和性能评估与预测提供了理论依据。本文为开发一整套微测辐射热计探测器计算机优化设计和仿真软件打下了坚实的基础。 对微测辐射热计性能进行了计算仿真，为非致冷微测辐射热计红外探测器性能预测和评估提供一种准确、快速、低成本的方法，并且开发了一整套对测辐射热计探测器进行计算机优化设计的仿真软件。对微测辐射热计在脉冲偏置下的响应，噪声以及其性能等建立了正确的理论模型，进行计算机数值计算。这一仿真软件对微测辐射热计的设计研制具有指导意义。 研究了微测辐射热计阵列读出电路并进行了非均匀性校正。本文对整个焦平面阵列的读出电路做了原理性地分析，着重提出了对读出电路校正的方法，并对传统的校正方法做出了修正，使非致冷微测辐射热计焦平面阵列具有更可靠的工作性能。更多还原

【Abstract】 The technology of uncooled infrared focal plane arrays (FPA) is a new developing way for wide commercial applications and military applications, for it owns the advantages of light weight, no need of cryogen, low cost and so on. This project is to do the related research about uncooled infrared FPA.This project is focused on microbolometer FPA. This program includes the development design and simulation tools, material research, fabrication process development, and detector and readout circuitry design, fabrication and characterization. The work done in this paper is described as follows:The theory of microbolometer FPA is expounded. Two important types of uncooled detectors are discussed and compared in detail. Research work is generally described.The main work is focused on the establishment of mathematic model for a microbolometer detector, in order to simulate the structure characteristic and the optical and electrical characteristics. After discussing the simple model, the finite element analysis model is proposed and established, for which a special computer program is programmed. This program can be used to analyze not only static characteristics also transient response ones. A strong base is established for the development of a software tool of microbolometer design and simulation in this paper.Using simple model of a microbolometer biased by pulse, useful practical equations and numerical estimates for the responsivity are derived. Noise, NEDT, NEP, and detectivity of microbolometer arrays are also considered. The work will provide the insight necessary to understand the optimum design and practical operating requirements of microblolmeter arrays. This paper provides a low cost and more practical software tool for predicting and evaluating parameters of the detector.The last effort in this paper is concentrated on the readout circuitry of microbolometer arrays, which is connected to the detector array on chip to forma monolithic chip, and the non-uniformity correction. Besides introducing some different ways of readouting the signal of detector pixel, the principle circuitry of the whole array is also put forward. And a kind of temperature compensated load circuit is put forward to improve the offset correction and the gain correction for non-uniformity.更多还原