【作者】 刘莹；

【导师】 温诗铸； 陈定方；

【作者基本信息】 武汉理工大学 ， 机械设计及理论， 2002， 博士

【摘要】 在微机电系统(MEMS)中，由于微构件的尺度效应、表面效应和量子效应，使得微观摩擦成为影响微机械运动及其性能的关键，是微机电系统研制中的关键基础问题，而微摩擦行为与表面形貌密切相关。本研究以微机电系统为背景，针对与微摩擦密切相关的表面形貌问题展开实验研究和理论分析。本研究选择微机械构件的高密度能量束微细加工方法中的准分子激光加工方法和常用材料，构造出表面微观形貌，揭示其表面形貌特征和表征方法，以及表面形貌与准分子激光加工工艺之间的相关关系。 本研究对准分子激光微细加工方法及加工工艺进行了开发研究。首次采用紫外波长为248nm的准分子激光对微机械构件常用的陶瓷、硅和金属等材料表面进行了微细加工，构造出准分子激光加工表面微观形貌。 对准分子激光加工表面微观形貌测量和表征方法进行了实验研究。采用接触式和非接触式方法测量准分子激光加工表面微观形貌；对测量数据进行统计参数计算和分析，提出了表征准分子激光加工表面形貌的合理的统计参数。实践表明，对于准分子激光加工表面微观形貌，仍可用常规的表面形貌统计参数来表征。 通过表面微观形貌二维图像的三维数字化处理，获得了一种表面形貌的直观的表面形貌表征方法，实现了采用原子力显微镜(AFM)和摩擦力显微镜(FFM)等对原子、分子表面形貌测量的类似功能。 在实验研究的基础上，对准分子激光加工表面微观形貌特征与加工工艺相关性进行了系统的研究，建立了表面微观形貌特征与加工工艺参数的相关关系，为准分子激光微细加工工艺参数的选择、表面微观形貌的修饰和微摩擦的控制研究奠定了基础。 从微机械的实际工况出发，设计了模拟实际工作条件的微摩擦测试装置及其测试系统，为建立微摩擦研究的实验手段打下了基础，填补了宏观摩擦和纳米摩擦试验装置——扫描探针显微镜之间的空白。更多还原

【Abstract】 Microfriction is the key factor that effects movement of micromachine and performance hi MEMS (microelectromechanical system), because of scale effect, surface effect and quanta effect of microcomponent. There is close correlation between movement of micromachine and surface topography of micromachine. In this dissertation, experimental research and theoretical analysis on surface topography related to micromachine ubder background of MEMS is carried out. Having selected excimer laser method in high density energy beam superfine processing method and common materials for micromachine its surface microcosmic topography is constructed, characteristics of surface topography and its characterization method were obtained, the relationship between surface topography and excimer laser processing method were obtained as well.Superfine processing method and technique for excimer laser were studied. It is the first time to superfine process the micromachine component by using 248nm ultraviolet wavelength of excimer laser. Surface microcosmic topography processed by excimer laser were constructed.Experimental research on the measure (contact and non-contact) and characterization methods of microcosmic topography surface processed by excimer laser were obtained.Two dimensional graphs of surface microcosmic topography are converted to three dimensional ones by digital means. Sequentially, an intuitionistic characterization method of surface topography which has similar functions as surface topography of atom and molecule measured by AFM and FFM is obtained.On the basis of experiment, the correlativity of characteristics of surface microcosmic topography processed by excimer laser and processing technique were established. That lays the foundation for choosing technical parameters of excimer laser superfine processing, ornment of surface microcosmic topography and research of micro friction control.According to working condition of microfriction tester which can simulate actualworking condition is developed. It offers a way to study microfriction and fills in thegap between macroscopic friction tester and nanometer friction tester- SPM(scanning probe microscope).更多还原